基于优化布拉格结构的纵向激发剪切波共振器的高电机械合系数
Zhiheng Zhang1, Weipeng Xuan1, Hong Jiang1
1Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310005, China.
Micromachines
|November 25, 2023
概括
一个新的坦酸 (LiTaO3) 薄膜共振器实现了高的电机械合系数,为先进的5G/6G通信系统提供了有前途的解决方案.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 声学工程 声学工程
背景情况:
- 微声波共振器是现代无线通信系统中至关重要的组件.
- 现有的共振器在同时实现高合和高质量因素方面存在局限性.
- 坦酸 (LiTaO3) 是一个有前途的压电材料用于共振器应用.
研究的目的:
- 提出并研究使用单晶LiTaO3薄膜的纵向激发的剪切波共振器 (YBAR).
- 通过优化布拉格反射器来提高YBAR的性能.
- 为了使5G/6G系统具有高质量 (Q) 因素的高合微声学共振器.
主要方法:
- 使用200纳米X切割LiTaO3薄膜和电极制造YBAR.
- 设计和实施一个SiO2 / Pt Bragg反射器,具有优化的层厚度比.
- 响应器的有效机电合系数 (k2eff) 和质量系数 (Q) 的表征.
- 与传统的四分之一波 (λ/4) 布拉格反射器进行比较.
主要成果:
- 在悬挂式结构中实现高效电机联接系数 (k2eff) 高达19%.
- 优化的布拉格反射器有效地反射了纵向和剪切波.
- 得到的共振器具有无假反应和高质量 (Q) 值.
- 与常规布拉格反射器共振器相比,表现出优越的性能.
结论:
- 基于LiTaO3薄膜的YBAR提供了微声波共振器技术的重大进步.
- 优化的布拉格反射器是实现高效波反射和高共振器性能的关键.
- 这项工作为开发未来5G/6G通信网络所必需的高性能共振器提供了可行的解决方案.
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