带有三角调节的MEMS共振器的非线性动力学
Lijuan Zhang1, Huabiao Zhang2, Xinye Li3
1School of Automobile and Transportation, Tianjin University of Technology and Education, Tianjin 300222, China.
Micromachines
|November 25, 2023
概括
本研究分析了使用三角调节的MEMS共振器的非线性动力学. 调整电压的增加导致微电机系统 (MEMS) 振荡器中更复杂的响应和跳跃现象.
科学领域:
- 非线性动力学是一种非线性动力学.
- 微电机系统 (MEMS) 是指微电机系统.
- 响应器物理 响应器物理
背景情况:
- 在各种传感和执行应用中,MEMS共振器是关键组件.
- 了解它们的非线性动态反应对于优化性能和可靠性至关重要.
- 三角调引入复杂的静电力,需要先进的分析方法.
研究的目的:
- 为了研究一个带有三角调的MEMS共振器的非线性动态响应.
- 分析调电压对共振器振幅频率特征和分叉行为的影响.
- 识别和描述不同类型的分叉和相关现象,如跳跃现象.
主要方法:
- 使用牛顿第二定律推导运动方程,结合不平滑调节的静电力.
- 用平衡和断面积分方法分析周期反应的分析解决方案.
- 奇点理论的应用,用于研究DC-AC电压平面上的分叉和地图过渡集.
主要成果:
- 成功获得了周期性反应的分析解决方案.
- 奇点理论揭示了复杂的分叉结构和电压平面上的持久区域.
- 调节电压的增加增强了硬化特性,引入了更多的分叉点,并导致了复杂的跳跃现象.
- 确定了两个不同的分叉点 (光滑和不光滑),后者与指的不均切换有关.
结论:
- 该研究提供了对特定MEMS共振器配置中的非线性动态的全面分析.
- 调节电压显著影响了共振器的动态行为,导致复杂的现象.
- 这些发现对于在非线性条件下运行的MEMS共振器的设计和控制至关重要.
相关概念视频
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01:23Parallel Resonance
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