基于电磁诱导透明度的中红外气体传感器在合的等离子共振器中
Sarah Shafaay1, Sherif Mohamed1, Mohamed Swillam1
1Department of Physics, School of Sciences and Engineering, The American University in Cairo, New Cairo 11835, Egypt.
Sensors (Basel, Switzerland)
|November 25, 2023
概括
这项研究引入了一种新的CMOS兼容的等离子传感器,用于中红外应用. 该传感器在气体检测方面表现出高灵敏度和选择性,为先进的传感技术铺平了道路.
科学领域:
- 光子学和等离子学.
- 材料科学 材料科学 材料科学
- 传感器技术 传感器技术
背景情况:
- 在化中的表面等离子极子子 (SPPs) 能够在传感,成像和光子学中实现新的应用.
- 兼容CMOS的制造对于将等离子体设备集成到现有技术中至关重要.
研究的目的:
- 提出和研究一个CMOS兼容的化等离子体传感器.
- 为了证明可调节的等离子体共振在中红外区域.
- 评估传感器检测气体 (甲和乙) 的性能.
主要方法:
- 使用在5 × 10^20厘米^-3度的剂传感器的制造.
- 使用合的金属绝缘体金属 (MIM) 环共振器.
- 描述等离子体模式配置,曲损失和共振转移.
- 测量传感器对甲和乙的灵敏度和选择性.
主要成果:
- 在中红外区域实现了表面等离子体共振.
- 通过控制载体密度来证明可调节的共振.
- 在7.7μm波长获得7539.9nm/RIU的灵敏度.
- 在气体传感方面获得6732的功绩 (FOM).
结论:
- 拟议的等离子传感器为中红外气体传感提供了高灵敏度和选择性.
- 结合环共振器可以提高传感性能,从而导致更小的FWHM和更高的灵敏度.
- 传感器的CMOS兼容性和性能使其适用于高级调制和传感应用.
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