设计和演示一个微电机械系统单环共振器与内环形弹支的惯性传感器的设计和演示
Imran Khan1, Ahmad Rahbar Ranji1, Gnanesh Nagesh1
1MicroNano Mechatronics Laboratory, Department of Mechanical, Automotive and Materials Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
Sensors (Basel, Switzerland)
|November 25, 2023
概括
本研究介绍了一种新的单环共振器,详细介绍其动态行为和共振频率. 该设计显示了基于应用电压的调节分频,通过制造和测试进行验证.
科学领域:
- 机械工程 机械工程
- 电气工程 电气工程
- 材料科学 材料科学 材料科学
背景情况:
- 微电子机械系统 (MEMS) 共振器对于各种电子应用至关重要.
- 了解共振器的动态行为和频率调节对于设备优化至关重要.
- 以前的设计往往缺乏简单性或高效的可调性.
研究的目的:
- 为了呈现一种新的,简单的单环共振器设计.
- 为了研究它的动态行为,包括模式形状,共振频率和频率转移.
- 探索应用直流和交流偏差电压对共振器性能和频率分割的影响.
主要方法:
- 使用数值模拟和分析计算来确定模式形状和频率.
- 对不同方位的共振频率,拉入电压和波响应进行了分析.
- 实验验证是在使用在绝缘体 (SOI) 晶圆技术制造的原型上进行的.
主要成果:
- 在n = 3振动模式下观察到最小的分裂频率.
- 应用的直流偏向电压在n = 3模式中在所有类型中均地增加了分裂频率.
- 交流电压阶段影响了n = 2模式中的共振频率数量 (两个频率为180度阶段,一个为同一阶段).
结论:
- 新的单环共振器设计表现出可预测和可调节的动态行为.
- 应用偏移电压为控制共振频率提供了一种方法,特别是分裂频率.
- 实验验证证证实了共振器的性能和设计对于频率调应用的有效性.
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