相关实验视频
Updated: Jul 10, 2025

07:55
Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
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异声波层表面声波共振器由LiNbO3和石英组成
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|November 27, 2023
概括
这项研究介绍了一种新的LiNbO3 / 石英异声层 (HAL) 表面声波 (SAW) 反响器. 新设计实现了高品质和宽带宽的高数字,同时具有出色的温度稳定性.
科学领域:
- 材料科学 材料科学 材料科学
- 声学 声学 在声学上
- 电气工程 电气工程
背景情况:
- 表面声波 (SAW) 共振器对于电子过器至关重要.
- 现有的LiNbO3 (LN) 共振器面临着温度稳定性和带宽方面的挑战.
- 异声层 (HAL) 结构为提高性能提供了潜力.
研究的目的:
- 为了研究一个LiNbO3/石英 (LN/Qz) HAL SAW共振器,以提高性能.
- 为了优化结构的高阻抗比 (Z-比) 和宽带宽 (BW).
- 为了弥补LN的负温度频率系数 (TCF),LN.
主要方法:
- 对LN/Qz HAL SAW共振器进行模拟和实验制造.
- 优化欧勒角和LN和Qz层的规范厚度.
- Z比率,BW,功绩数字 (FoM) 和TCF的表征.
主要成果:
- 在700MHz时实现了95dB的Z比率和15.9%的BW.
- 制造的共振器表现出410的合适FoM,这是基于LN的共振器中报告的最高值.
- 获得的TCF为-77 ppm/°C,显示出良好的温度补偿.
结论:
- 与传统设计相比,LN/Qz HAL SAW共振器表现出优越的Z比率,BW和TCF.
- 这种结构为开发具有的传输带和稳定的温度特征的高性能宽带过器提供了巨大的潜力.
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