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在氧化物薄膜中用于相位识别的红外信号

Samantha T Jaszewski^1,2, Sebastian Calderon³, Bishal Shrestha^4,5

¹Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

|November 28, 2023

概括

红外光谱现在可以区分不同阶段的氧化 (HfO2) 薄膜,这对于开发下一代电子产品至关重要. 这种方法提供了一种快速,非破坏性的方法来识别相位,有助于铁电材料研究.

科学领域:

材料科学材料科学材料科学
固态物理固态物理
纳米技术纳米技术

背景情况:

基于HfO2的薄膜对下一代的内存和计算有希望.
准确的相位识别对于理解铁电机制至关重要.
像X射线衍射这样的现有方法难以区分类似的HfO2相.

研究的目的:

建立红外光谱作为一种可靠的方法,用于在未使用HfO2薄膜中进行相位识别.
要区分铁电,反极和单极相.
为了证明纳米FTIR的快速,纳米尺度相位分析能力.

主要方法:

化未使用HfO2的薄膜以达到特定的晶体相 (Pca21,Pbca,P21/c).
同步子纳米-里埃变换红外光谱 (纳米-FTIR) 用于振动特征的获取.
使用传输电子显微镜 (TEM) 和电气测量来确认相位.

主要成果:

纳米FTIR成功地区分了Pca21 (铁电),Pbca (反极) 和P21/c (单临床) 阶段.
发现每个阶段的红外特征是独一无二的,独立于替代剂.
反铁电反应最终归因于Pbca阶段,而不是四角形阶段.

结论:

红外光谱,特别是纳米FTIR,为HfO2相位识别提供了快速,非破坏性和纳米尺度的工具.
这种技术克服了像XRD这样的传统方法的局限性.
它可以精确地隔离影响HfO2材料中铁电相稳定的因素.

关键词:

铁路电力公司氧化物氧化物红外光谱学红外光谱学阶段阶段阶段传输电子显微镜传输电子显微镜

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