使用1700nm扫描源光学连贯显微镜对腐蚀铜氧化的非破坏性体积光学分析
Optics express
|November 29, 2023
概括
一种新的光学连贯显微镜方法精确地测量了氧化铜的厚度,没有损坏. 这种技术增强了腐蚀分析,并为金属完整性评估的工业应用提供了潜力.
科学领域:
- 材料科学 材料科学 材料科学
- 光学工程是指光学工程.
- 腐蚀科学 腐蚀科学
背景情况:
- 对金属腐蚀的准确表征对于工业应用至关重要.
- 评估金属氧化的传统方法可能具有破坏性或缺乏精度.
- 光学连贯显微镜 (OCM) 提供了对材料表面的非破坏性分析的潜力.
研究的目的:
- 开发和验证一种新型的非破坏性方法,用于使用OCM精确表征腐蚀铜氧化.
- 为了提高金属氧化物层厚度测量的精度,与传统的光学一致性断层扫描 (OCT) 相比.
- 评估铜氧化在一个定义区域的均性和分布.
主要方法:
- 使用了一种特殊的OCM系统,波长为1700nm,数值光圈 (NA) 为0.15.
- 开发了一种零填充的峰值查找算法,用于准确地确定氧化铜层厚度.
- 与扫描电子显微镜 (SEM) 图像进行验证的OCM测量.
- 准备的铜氧化样品通过在900°C进行热处理,持续时间不同 (1,2,4,8小时).
主要成果:
- OCM方法提供了比OCT更好的表面造型和更高的横向分辨率.
- 对氧化铜层的厚度测量与SEM数据进行了验证.
- 面对面的3D图像显示了4mm × 4mm区域内的局部腐蚀分布.
- 氧化铜的厚度变化随着热处理时间的增加而增加,表明氧化不均.
结论:
- 开发的OCM技术提供了精确的,非破坏性的铜氧化特征.
- 该方法可以评估腐蚀均性和分布.
- 这种技术显示出在各种行业中非接触式金属腐蚀检测和速率评估的巨大潜力.
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