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多视图拼接阶段测量偏向计,用于自由形式的镜面表面计量学.

Siyuan Jiang, Qiaozhi He, Yifan Xing

    Optics express
    |November 29, 2023
    PubMed
    概括

    本研究介绍了多视图拼接相位测量偏向计 (PMD),以准确测量复杂的镜面表面. 这种新的方法克服了传统PMD在自由形态光学和曲显示器方面的局限性.

    科学领域:

    • 光学计量学 在光学计量学
    • 表面检查检查 表面检查
    • 自由形式光学测量测量

    背景情况:

    • 阶段测量偏向计 (PMD) 对于镜面表面检查非常有价值.
    • 在自由形表面上的高局部斜率会导致光线分散,挑战传统的PMD.

    研究的目的:

    • 开发一个多视图拼接PMD系统,用于准确测量自由形镜面表面.
    • 为了克服单视图PMD在处理高局部斜率和光线分散方面的局限性.

    主要方法:

    • 利用多个传感器和一个屏幕来捕捉区域表面的外观.
    • 实施了精确的系统校准,以纠正每个区域的绝对深度.
    • 拼接区域外观,重建完整的3D表面形态.

    主要成果:

    • 对于球形透镜 (PV 2.9 mm) 实现了5.3μm (0.18%的相对误差) 的测量精度.
    • 成功测量了一个曲的手机屏幕,局部斜率从-46.1°到51.3°.
    • 测量了一个自由形式的烯酸板 (PV 5.3 毫米),局部斜率从 -6.7°到7.7°.

    结论:

    • 多视图拼接PMD有效地重建复杂的镜面表面.

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  • 拟议的方法提高了自由形光学和曲线显示器的准确性和适用性.