在2.6-2.7微米时,在绝缘体上集成元件的低损耗运行
Optics express
|November 29, 2023
概括
新的光子学使紧的中红外传感器成为可能. 这项技术实现了波导和微型曲线的创纪录的低损失,这对于具有成本效益的传感应用至关重要.
科学领域:
- 光子学和光学工程的工程.
- 材料科学 材料科学 材料科学
- 应用物理 应用物理
背景情况:
- 中红外 (MIR) 光子对于传感应用至关重要.
- 现有的MIR光子系统往往缺乏紧性和成本效益.
- 在绝缘体 (SOI) 平台为集成光子解决方案提供了潜力.
研究的目的:
- 为了证明微米尺度SOI光子集成元件在2.6-2.7μm波长区域的低损耗运行.
- 开发用于MIR传感的紧且具有成本效益的光子系统.
- 为SOI波导提供创纪录的低传播和曲损失.
主要方法:
- 使用3微米厚的核心层SOI平台.
- 制造和特征单模波导和微型曲面几何形状.
- 设计并模拟了一个基于echelle格子的波长过器.
- 测量波导的传播损失和曲损失.
主要成果:
- 实现了创纪录的低单模波导传播损失0.56 ± 0.09 dB/cm.
- 对于微型曲线几何形状,证明曲线损失低于0.08dB.
- 介绍了一种带宽为1.56nm的波长过器,选择2.64-2.7μm波段内的频道.
- 经过模拟验证的实验结果.
结论:
- 3微米厚的SOI平台使2.6-2.7微米范围内的低损耗和低折射波导成为可能.
- 这项技术适用于开发紧且具有成本效益的MIR光子集成电路.
- 展示的组件为先进的MIR传感应用铺平了道路.
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