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通过热蒸发沉积制备的敏感SPR传感器

Chengchao He¹, Yanhong Li¹, Yuxiang Yang¹

¹School of Optoelectrical Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China.

|November 29, 2023

概括

我们开发了高质量的 (Al) 表面等离子体共振 (SPR) 传感器,用于蓝色可见光. 这些具有成本效益的Al SPR传感器提供了广泛的光谱范围和高灵敏度,有可能取代黄金传感器.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
频谱学是一种光谱学.

背景情况:

表面等离子共振 (SPR) 传感器对于实时分子检测至关重要.
金 (Au) SPR传感器主导传感,但在光谱范围和成本方面存在局限性.
(Al) 在SPR应用中提供了更广泛的光谱覆盖和更低成本的潜力.

研究的目的:

开发高质量的Al薄膜,用于在蓝色可见区域的SPR传感.
为了优化原子级表面粗度的Al SPR传感器的沉积条件.
评估Al SPR传感器作为Au SPR传感器的替代品的性能和潜力.

主要方法:

薄薄的Al膜被沉积在使用热蒸发的化片上.
沉积参数,包括真空水平 (7 × 10−4 Pa) 和沉积速率 (1.473.41 nm/s) 被控制.
使用405nm探测光进行SPR测量,用于批量折射率传感.

主要成果:

实现了高质量的Al膜,其表面粗度达到原子级.
在批量折射率测量时,实验灵敏度达到149.9°/RIU.
Al SPR 传感器显示出广泛的工作频率范围 (深紫外线到近红外线).

结论:

优化的Al SPR传感器提供了宽松的沉积要求和缩短的操作时间.
与传统的Au SPR传感器相比,Al SPR传感器提供了更广泛的光谱范围.
具有成本效益和稳定的Al SPR传感器显示出成为SPR传感技术新标准的巨大潜力.

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