通过分析反射干扰边缘来测量薄膜的厚度和折射率

Applied optics
|December 1, 2023
PubMed
概括

这项研究引入了一种新方法,用于使用反射分析准确测量薄膜厚度和折射率. 该技术通过使用高指数介质克服了局限性,使得精确的介电薄膜特征化成为可能.

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