静电放电诱导的光电性质的降解和基于GaAs的氧化物受限VCSEL的缺陷演变
Optics express
|December 2, 2023
概括
静电放电 (ESD) 会对基于甲 (GaAs) 的垂直腔表面发射激光器 (VCSEL) 造成损害. 反向偏差ESD更具破坏性,导致突然的缺陷乘法和设备故障.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 光电学是指光电子产品.
背景情况:
- 基于化 (GaAs) 的氧化物封闭垂直腔表面发射激光器 (VCSEL) 是重要的光电子设备.
- 这些VCSEL具有已知的可靠性相关损坏的漏洞,特别是来自静电放电 (ESD).
研究的目的:
- 研究由静电放电 (ESD) 诱导的氧化物封闭VCSEL中的降解和故障机制.
- 了解ESD压力造成的缺陷的扩散及其对设备性能的影响.
主要方法:
- 将VCSEL置于人体模型 (HBM) 静电放电 (ESD) 压力下.
- 分析光电特征的退化情况.
- 使用光学辐射和微观结构分析观察缺陷演变.
主要成果:
- 前向和反向ESD脉冲的降解值分别为200V和-50V.
- 与前进偏差ESD相比,VCSEL对反向偏差ESD的敏感性更高.
- 设备故障与ESD电流密度的增加有关,导致来自氧化物开口边缘的暗线缺陷 (DLD) 增加.
- 缺陷形成是突然发生的,局部事件,传播到损害整个活性区域.
结论:
- 由ESD引起的缺陷扩散是氧化物受限VCSEL的主要故障机制.
- 反向偏差ESD对VCSEL可靠性构成更大的风险.
- 了解这些缺陷动态对于提高未来VCSEL可靠性至关重要.
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