使用单端口射频反射计测量可变电容的测量
Rene Celis-Cordova1, Jacob J Gose1, Abigail F Brown1
1Department of Electrical Engineering, 275 Fitzpatrick Hall of Engineering, University of Notre Dame, Notre Dame, Indiana 46556, USA.
The Review of scientific instruments
|December 8, 2023
概括
射频反射测量可以测量微电子机械系统变量电容,用于节能计算. 这种技术显示出 0-30 fF 范围内的设备特征的潜力,前提是寄生虫抗性低.
科学领域:
- 电气工程 电气工程
- 材料科学 材料科学 材料科学
- 计算机工程 计算机工程
背景情况:
- 通过减少散热,adiabatic可逆计算提供了节能计算.
- 微电子机械系统 (MEMS) 变电容器是可逆计算架构中的数字门的关键组件.
- 描述这些可变电容器对于优化电路性能和能源效率至关重要.
研究的目的:
- 介绍一项用于测量设备容量的射频 (RF) 反射计技术.
- 描述用于可逆计算应用的MEMS可变电容器设备.
- 评估RF反射计的可行性,以测量在特定电容范围内的可变电容.
主要方法:
- 使用单端口射频反射计,配备定制的射频探头,并配备内置匹配网络.
- 使用电容银行对射频探头进行校准,以观察指示电容变化的频率转移.
- 测量静态电容器和MEMS可变电容器,以评估该技术的性能和限制.
主要成果:
- 射频反射测量技术成功测量了静态电容,没有显著的寄生性阻力.
- 在MEMS可变电容器中,高系列寄生电阻 (约80kΩ) 掩盖了频率转移,阻碍了准确的测量.
- 射频反射计证明了在0-30 fF范围内测量MEMS可变电容器的潜力,当寄生性阻力不是限制因素时.
结论:
- 射频反射计是一种潜在的快速和多功能方法,用于表征变量电容.
- 该技术的有效性受到测试设备中的寄生虫耐药性的显著影响.
- 需要进一步开发,以克服与测量高电阻MEMS可变电容器相关的挑战,用于节能计算应用.
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