化物层增长对不同微通道结构下沉积率的影响
Wansuo Liu1, Xiangji Yue1, Zeng Lin1
1School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110004, China.
ACS omega
|December 11, 2023
概括
在等离子增强化学蒸汽沉积 (PECVD) 淋浴头中的微通道修改可以提高沉积均性. 扩展型微通道更适应蚀刻引起的直径变化,保持稳定的流量和薄膜厚度.
科学领域:
- 材料科学 材料科学 材料科学
- 化学工程是化学工程的重要组成部分.
- 流体动力学 流体动力学
背景情况:
- 增强等离子体化学蒸汽沉积 (PECVD) 依赖于淋浴头来实现气体均分布.
- 淋浴头微通道可以因蚀刻 (HF) 而改变直径,影响沉积均性.
- 微通道结构的修改可以减轻这些统一性问题.
研究的目的:
- 为了研究微通道结构在直径变化下对流量均性的影响.
- 为了比较相同直径和扩展型微通道的性能.
- 确定在PECVD中保持沉积统一性的策略.
主要方法:
- 纳维埃-斯托克斯和直接模拟蒙特卡洛 (NS-DSMC) 方法的合.
- 模拟两个微通道类型 (直径相同和扩张) 的速度变化,直径变化相同.
- 在模拟蚀刻条件下分析流场行为.
主要成果:
- 扩展型微通道在相同的直径变化中显示的速度变化比直径相同的类型少.
- 扩展型微通道中的稳定速度促进了一致的停留时间.
- 这种一致性对于在表面反应有限的系统中保持均的薄膜厚度至关重要.
结论:
- 扩展型微通道有利于减少直径变化对PECVD沉积均性的影响.
- 修改微通道几何学提供了一个可行的解决方案,以保持过程稳定性,尽管蚀刻诱导的磨损.
- 这项研究有助于优化PECVD流程,以提高电影质量和一致性.
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