对于极端紫外线等离子体光源的集体森散射测量有条纹
M Simeni Simeni1,2, A S Davies3, A Diallo1
1Princeton Plasma Physics Laboratory, Princeton, New Jersey 08543, USA.
The Review of scientific instruments
|December 11, 2023
概括
前进建模显示,条纹集体森散射可以测量极端紫外线光刻的锡等离子体. 这种技术可以在很大区域探测离子声波,但由于信号低,电子等离子波的测量位置有限.
科学领域:
- 血物理学的等离子体物理学
- 激光与等离子体相互作用
- 极端紫外线的 lithography 极端紫外线的 lithography 极端紫外线的 lithography 极端紫外线的 lithography 极端紫外线的 lithography
背景情况:
- 激光制造的等离子体对于极端紫外线 (EUV) 石版非常重要.
- 了解等离子体动力学,包括电子和离子波,对于优化EUV源至关重要.
- 集体森散射是一种用于探测等离子体特性的诊断技术.
研究的目的:
- 调查使用条纹集体森散射 (SCTS) 来诊断激光制造的锡等离子体的可行性.
- 评估SCTS对电子等离子波 (EPW) 和离子声波 (IAW) 的同时测量能力.
- 评估探头激光加热和背景辐射对测量准确性的影响.
主要方法:
- 执行SCTS测量的前期建模计算.
- 模拟一个532nm探针激光束在锡等离子体上的散射.
- 计算EPW和IAW散射光的绝对光子计数.
- 计算探头激光电子加热和制动辐射辐射.
主要成果:
- 在EUV光刻条件下,对于锡等离子体来说,SCTS测量是可行的.
- IAW 功能允许在一个大时空区域进行探测.
- 由于信号噪声比较低,EPW检测仅限于单个测量位置.
- 计算了两种波型散射的绝对光子计数.
结论:
- 条纹集体森散射是EUV光刻等离子体的可行诊断方法.
- 拟议的方法允许详细描述等离子波的特征.
- 建议为这些测量提供一个便携式的桌面系统.
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