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评估原子层沉积 (ALD) 过程和降低它的途径对环境的影响
Matthieu Weber1, Nils Boysen2,3, Octavio Graniel1
1Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, Grenoble F- 38000, France.
ACS materials Au
|December 13, 2023
概括
原子层沉积 (ALD) 提供精确的纳米级涂层,但对环境产生影响. 这次审查评估了ALD.
科学领域:
- 材料科学 材料科学 材料科学
- 环境科学 环境科学
- 化学工程是化学工程的重要组成部分.
背景情况:
- 对资源枯竭,气候变化和污染的日益关注,需要可持续的工业流程.
- 原子层沉积 (ALD) 是精确的表面工程的关键纳米技术,对于先进的应用至关重要.
- 虽然ALD可以增强可再生能源设备,但它自己的环境足迹需要减少.
研究的目的:
- 审查和总结有关ALD环境影响评估的现有研究.
- 在ALD过程中讨论绿色化学的原则.
- 建议未来的战略,以提高ALD的可持续性.
主要方法:
- 对ALD环境影响评估的文献综述.
- 通过绿色化学原则的透视来分析ALD过程.
- 识别和讨论对ALD可持续性的潜在改进.
主要成果:
- 目前ALD过程对环境的影响很大,需要减轻.
- 通过优化反应堆设计和过程参数,可以提高ALD的可持续性.
- 空间ALD (SALD) 和开发更绿色的前体等高通量方法是有前途的解决方案.
结论:
- 减少ALD对环境的影响对于其更广泛的采用和对可持续发展的贡献至关重要.
- 实施绿色化学原理和先进的工艺设计可以显著改善ALD的生态形象.
- 未来的研究应该专注于优化ALD以减少环境影响,特别是在能源和电子领域.
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