基于自扩展的多重图案为2D材料的制造超出了石版界限

Poonam Subhash Borhade1,2,3, Tawat Chen1, Ding-Rui Chen3,4,5

  • 1Department of Physics, National Taiwan University, Taipei, 10617, Taiwan.

概括

研究人员开发了一种用于二维 (2D) 材料的新型多图案技术,可以为先进电子产品制造纳米尺寸特征的超精确制造. 这种自我扩展双重模式 (SEDP) 方法克服了当前方法的局限性.

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