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相关实验视频

Updated: Jul 8, 2025

Extracting Metrics for Three-dimensional Root Systems: Volume and Surface Analysis from In-soil X-ray Computed Tomography Data

Extracting Metrics for Three-dimensional Root Systems: Volume and Surface Analysis from In-soil X-ray Computed Tomography Data

Published on: April 26, 2016

基于X射线的覆盖计量学使用互惠空间切片分析.

Jiahao Zhang, Xiuguo Chen, Tianjuan Yang

|December 15, 2023

概括

这项研究引入了一种新的基于X射线的覆盖计量技术,使用互惠空间切片分析 (RSS). 该方法提供了高精度覆盖测量,克服了半导体制造当前光学和X射线衍射方法的局限性.

科学领域:

材料科学与工程材料科学与工程
计量学和测量科学计量学和测量科学
纳米技术和半导体制造业制造业

背景情况:

在半导体制造中,覆盖计量对于石版工具性能和工艺产量控制至关重要.
目前基于光学衍射的覆盖计量技术面临着灵敏度的限制.
现有的X射线方法,如临界尺寸小角度X射线散射 (CDSAXS),由于相互空间映射 (RSM) 和反向问题解决,具有吞吐量约束.

研究的目的:

提出一种基于X射线的新型覆盖计量方法,以提高精度和吞吐量.
解决半导体制造中现有的计量技术的局限性.
探索基于X射线的技术在集成电路计量学的潜力.

主要方法:

开发一种基于X射线的覆盖计量技术,利用互惠空间切片分析 (RSS).
在单一的入射角度 (AOI) 进行的测量.
分析该方法对覆盖目标格子制造和测量的错误的稳定性.

主要成果:

使用拟议的RSS方法实现了高精度覆盖测量.
证明了该方法对制造和测量错误的有效性和稳定性.
验证了基于X射线的技术对先进的集成电路计量学的潜力.

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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Published on: April 13, 2016

Measuring the Complete-arch Distortion of an Optical Dental Impression

Measuring the Complete-arch Distortion of an Optical Dental Impression

Published on: May 30, 2019

相关实验视频

Last Updated: Jul 8, 2025

Extracting Metrics for Three-dimensional Root Systems: Volume and Surface Analysis from In-soil X-ray Computed Tomography Data

Extracting Metrics for Three-dimensional Root Systems: Volume and Surface Analysis from In-soil X-ray Computed Tomography Data

Published on: April 26, 2016

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages

Published on: April 13, 2016

Measuring the Complete-arch Distortion of an Optical Dental Impression

Measuring the Complete-arch Distortion of an Optical Dental Impression

Published on: May 30, 2019

结论:

建议使用RSS的基于X射线的覆盖计量技术是一种可行的和有效的技术.
这种方法为当前计量学提供了一个有希望的替代方案,提高了精度和吞吐量.
基于X射线的计量学对未来的集成电路制造和检测具有重大潜力.