轴移映射:用于测量近圆柱形表面的轴形状的自我引用测试
Applied optics
|December 18, 2023
概括
轴转移映射解决了圆柱体横向剪切干涉测量的二次模糊性. 这种新方法准确地测量了表面地形,实现了圆柱形光学的高可重复性.
科学领域:
- 光学计量学是指光学计量学.
- 表面表征表征表征的表征表征.
- 干涉测量是干涉测量的方法.
背景情况:
- 横切割自参照干扰测量通过移动测试表面来将表面地形与参考表面分开.
- 移动时的刚体错误在提取的表面的二次数中引入了模糊性.
研究的目的:
- 为了呈现轴移映射,一种新的方法来解决圆柱形表面的横向剪切干扰的二次含糊性.
- 为了验证轴移映射的准确性和可重复性,用于圆柱形光学的全表面提取.
主要方法:
- 开发了轴移映射,结合文物镜来测量干扰仪视野内的刚体误差.
- 应用该方法测量平面镜子,与三平面测试相比,获得2.8纳米RMS差异.
- 扩展轴移映射到圆柱形表面,使用计算机生成的全息图.
主要成果:
- 实现了沿轴方向的圆柱形光学的全表面提取,具有4.4纳米RMS可重复性.
- 提取的参考表面与计算机生成全息图基板的预期波面误差 (在4.5nm RMS范围内) 有很好的一致性.
结论:
- 轴移映射有效地解决了圆柱形表面的横向剪切干涉测量的二次模糊性.
- 该方法证明了高精度和可重复性,用于圆柱形光学的精确表面计量.
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