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桌面极端紫外线反射仪用于定量纳米尺度反射仪,散射仪和成像仪

Yuka Esashi1, Nicholas W Jenkins1, Yunzhe Shao1

  • 1Department of Physics, JILA, and STROBE NSF Science and Technology Center, University of Colorado Boulder and NIST, Boulder, Colorado 80309, USA.

The Review of scientific instruments
|December 18, 2023
PubMed
概括

一种新的极紫外 (EUV) 成像反射仪为纳米结构提供了高精度,非破坏性的计量技术. 这种先进的工具量化测量了几何和组成,这对于半导体和材料科学应用至关重要.

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UV–Vis Spectrometers01:14

UV–Vis Spectrometers

The absorbance of UV and visible (UV–visible) radiations is measured using a UV–visible spectrophotometer. Deuterium lamps, which emit UV radiation, and tungsten lamps, which produce radiation in the visible region, are used as light sources in UV–visible spectrophotometers. A monochromator or prism is used for diffraction grating, i.e., to split the incoming radiation into different wavelengths. A system of slits is used to focus the desired wavelength on the sample cell.
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