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Updated: Jul 7, 2025

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半导体制造工艺的监测贝叶斯AEWMA控制图在配对排序集采样方案下

Yuzhen Wang1, Imad Khan2, Muhammad Noor-Ul-Amin3

  • 1School of Science, Xi'an Technological University, Xi'an, 710032, China.

Scientific reports
|December 20, 2023
PubMed
概括

一个新的贝叶斯适应性EWMA (AEWMA) 控制图改善了过程监控. 这种先进的质量控制方法,使用配对排序集采样,有效地检测工艺手段的变化.

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相关概念视频

Introduction to Statistical Process Control01:15

Introduction to Statistical Process Control

Statistical Process Control (SPC) is a method used to monitor and control quality within processes, particularly in manufacturing and service delivery, by employing statistical methods. SPC aims to distinguish between natural (common cause) variation and variation due to specific changes or events (special cause), allowing for timely improvements and sustained quality. The control chart, a pivotal tool in SPC, visually displays data over time alongside a central line of upper and lower control...
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The R Chart01:02

The R Chart

In statistical process control, control charts, particularly R charts, are instrumental in monitoring process variations and identifying non-random patterns that run charts might miss. R charts track the variability within process subgroups, which is crucial when standard deviation use is impractical or unknown process variations exist.
R charts are pivotal for pinpointing shifts in process variability. Stability is indicated when all data points remain within the defined upper and lower...
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The X̄ Chart00:58

The X̄ Chart

The  x̄ chart is a statistical tool for monitoring the means in a process.
The x̄ chart, often known as the individual control chart, is a crucial tool in statistical process control. It is designed to monitor process behavior and performance over time and is widely used in various industries to ensure that processes are operating at their optimum capacity and within specified limits.
A x̄ chart is constructed by plotting individual measurements of a quality...
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Interpreting X̄ Charts01:13

Interpreting X̄ Charts

Interpreting x̄ charts, a type of control chart used in statistical process control helps monitor the variation in processes over time. The x̄ chart is based on the sample mean and allows for monitoring variations in the process mean over time. These charts are pivotal for quality assurance in manufacturing and other sectors.
An x̄ chart plots the values of individual measurements over time against control limits calculated from historical data. The central line...
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Run Charts01:12

Run Charts

Run charts serve as an essential instrument for visualizing the performance of various processes over time, enabling the identification of trends and patterns crucial for quality improvement. These charts map out a series of data points chronologically, offering insights into the stability and efficiency of a process. A run chart's creation involves plotting data points on a graph, with the time intervals on the horizontal axis and the specific measurements on the vertical axis. For...
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Interpreting R Charts01:22

Interpreting R Charts

R chart, or range chart, is a fundamental tool in statistical process control used to monitor the variability within a process. It complements the X-bar (x̄) chart by focusing on the range of the data, rather than individual values, providing a clear picture of the process dispersion over time.
An R chart plots the range of subsets of measurements collected from a process. Each point on the chart represents the range—defined as the difference between the maximum and minimum...
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