紧的快照双模式干扰度系统用于机器上的测量
Daodang Wang1,2, Xiangyu Fu1, Ping Xu1,3
1College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China.
Optics and lasers in engineering
|December 21, 2023
概括
一个新的紧型干扰仪同时测量表面形状和粗度. 这种双模式系统简化了光学制造计量技术,以提高表面特征.
科学领域:
- 光学工程的光学工程.
- 计量学 计量学 计量学
- 表面表征表征表征的表征表征.
背景情况:
- 机上计量对于高效的光学制造至关重要.
- 同时测量表面形状和粗度具有挑战.
- 现有的系统可能缺乏紧性或简单性.
研究的目的:
- 为机器计量提供一个紧的,双模式的干扰度系统.
- 为了简化表面形状和粗度的测量.
- 为了提高光学制造中的表面表征能力.
主要方法:
- 一种新的光学波器设计将参考臂梁分开,用于双模式操作.
- 一个带有微极化器阵列的像素化摄像头可以同时捕捉相位移的干涉图.
- 基于配置优化的低光圈接延长了可测量的光圈.
主要成果:
- 拟议的系统成功地同时进行表面形状和粗度测量.
- 数值分析和实验验证证证实了系统的可行性.
- 该系统证明了可移植性和适合机器上应用的适用性.
结论:
- 紧的快照双模式干扰仪为光学制造提供了强大的工具.
- 它可以在不同的空间频率和光圈大小上对机器表面进行表征.
- 该系统解决了在光学生产中对高效和多功能计量学的需求.
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