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Updated: Jul 7, 2025

Video-rate Scanning Confocal Microscopy and Microendoscopy
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Published on: October 20, 2011

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在超高真空环境下进行表面成像和分析的低压扫描电子显微镜的形静电镜的设计和优化

Jeong-Woong Lee1, In-Yong Park2, Takashi Ogawa3

  • 1Scientific Instruments Performance Evaluation Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Korea.

Ultramicroscopy
|December 22, 2023
PubMed
概括

我们为超高真空低压扫描电子显微镜 (UHV LV-SEM) 设计了一种最佳的圆形静电镜头 (EOL). 这种镜头提高了空间分辨率和二次电子检测效率,用于表面分析.

关键词:
静电镜头的目标镜头是静电镜头.低压的SEM是低压的SEM探头直径的探头直径.二次电子检测效率的二次电子检测效率.球形和染色异常是球形和染色异常.表面分析 表面分析超高真空超高真空的使用方法

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