嵌入薄膜应变传感器的力测量工具系统的结构设计和优化
Xiangtao Song1, Wenge Wu1, Yongjuan Zhao1
1School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
Micromachines
|December 23, 2023
概括
这项研究引入了一种改进的力测量工具系统,使用优化的薄膜应变传感器. 新设计将电阻的灵敏度提高了20%以上,以实现更准确的力测量.
科学领域:
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
- 传感器技术 传感器技术
背景情况:
- 研磨力测量对于加工过程优化至关重要.
- 现有的薄膜应变传感器在灵敏度上有局限性.
- 弹性梁结构用于力测量工具.
研究的目的:
- 设计和开发一个先进的力测量工具系统.
- 为了提高薄膜应变传感器的应变灵敏度.
- 为了研究优化薄膜应变传感器几何.
主要方法:
- 建立了弹性梁的简化机械模型.
- 优化了基板,过渡,绝缘和电阻网格层的形状.
- 利用湿蚀用于传感器制造和显微镜用于表面分析.
- 在一个定制的实验平台上测试电气性能.
主要成果:
- 开发了一种新型的薄膜应变传感器,采用双端支持电阻网梁.
- 实现了整齐的阻力网格层图案,具有高维度准确性.
- 与平面传感器相比,增加了约20% (至51.2%) 的电阻灵敏系数.
结论:
- 优化的薄膜应变传感器设计显著提高了灵敏度.
- 开发的研磨力测量工具系统符合设计要求.
- 这种进步为更精确的加工过程监控提供了潜力.
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