在分层压电基板中提取模式合参数,并将其应用于双模式 SAW 过器
Lingqi Li1, Qiaozhen Zhang1, Yang Yang1
1The College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200233, China.
Micromachines
|December 23, 2023
概括
本研究引入了一种结合模式合 (COM) 理论和有限元法 (FEM) 的新方法,用于表面声波 (SAW) 装置分析. 该方法准确地预测设备性能,并优化关键参数以提高功能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 声学 声学 在声学方面
背景情况:
- 表面声波 (SAW) 设备对于各种电子应用至关重要.
- 精确建模SAW设备的电声和热行为对于性能优化至关重要.
- 对于复杂的SAW设备结构,现有的方法可能缺乏效率或准确性.
研究的目的:
- 开发一种先进的计算方法,快速提取COM参数.
- 准确预测SAW设备的电声和温度行为.
- 为了证明该方法对复杂SAW设备设计和性能增强的有效性.
主要方法:
- 将模式合 (COM) 理论与有限元法 (FEM) 的整合.
- 将组合方法应用于标准SAW共振器进行验证.
- 一个创新的I.H.P.P.的分析. 使用29°YX-LT/SiO2/SiC结构的SAW共振器.
主要成果:
- 优化一个I.H.P.的优化. SAW 共振器实现了 13.92% 的机电联接系数 (K2) 和 1265.5 的质量系数 (Q).
- 达到了 - 10.67 ppm/°C 的温度频率系数 (TCF).
- 成功设计了一种双模式SAW (DMS) 过器,其插入损失低,温度稳定性很好.
结论:
- 联合COM-FEM方法提供了SAW设备的高效和准确分析.
- 该方法对于复杂结构是有效的,可以提高性能.
- 这种方法是设计和优化下一代SAW设备的宝贵工具.
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