MEMS 静电驱动合光束过器银行
Richard Syms1, Adam Bouchaala1
1Department of Electrical and Electronic Engineering, Imperial College London, Exhibition Road, London SW7 2AZ, UK.
Micromachines
|December 23, 2023
概括
研究人员开发了新的微电机系统 (MEMS) 带通波器,使用质量负载束来改进调节. 这种技术使得用于先进应用的紧型,高性能过器库成为可能.
科学领域:
- 电气工程 电气工程
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
背景情况:
- 微电机系统 (MEMS) 带通波器对于信号处理至关重要.
- 现有的过器面临着调整困难,特别是对于更高的订单和平行板设计.
- 在MEMS过器设计中,平面内运动和静电驱动是常见的.
研究的目的:
- 为了解决更高阶MEMS带宽波器的调整困难.
- 引入一种新的设计,使用大质量负载束进行同步静电调节.
- 将这一原则扩展到类似或不相似的过器的紧集.
主要方法:
- 展示使用静电驱动,机械合束的MEMS带宽波器.
- 集成带有质量负载的光束用于直流电压诱导的偏移和同步调节.
- 使用一次性元素模型 (LEM) 和模拟进行建模,通过刚度矩阵方法 (SMM) 验证.
主要成果:
- 成功演示了MEMS带宽过器,直至VHF频段.
- 质量负载束使同步调能够在不干扰动态操作的情况下实现.
- 模拟显示高达八个过器的银行有效的性能.
结论:
- 提出的方法有效地解决了MEMS带宽波器内在的调整困难.
- 该设计允许紧的,紧密的过器银行具有局部化的模式.
- 该原理可扩展到更高阶共振和替代合共振器系统.
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