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Updated: Jul 7, 2025

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精确的焦点定位在不透明基板上,基于激光微制造中的衍射现象

Xian Jing1,2, Pengju Zhao2, Fuzeng Wang2

  • 1College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.

Micromachines
|December 23, 2023
PubMed
概括

一种新的基于衍射模式的焦点定位方法 (DFSPM) 精确地定位在不透明基板上的激光焦点. 这种技术实现了100nm分辨率,提高了激光微型制造的精度.

关键词:
衍射模式的衍射模式.焦点位置定位 焦点定位激光微型制造的微型制造不透明的基板.两光子光刻 lithography 的两光子光刻 lithography 的两光子光刻 lithography 的两光子

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