在高功率和射频应用的氧化场效应晶体管的进展
Ory Maimon1,2, Qiliang Li1,2,3
1Department of Electrical Engineering, George Mason University, Fairfax, VA 22030, USA.
Materials (Basel, Switzerland)
|December 23, 2023
概括
β-阶段氧化物 (β-Ga2O3) 显示出对下一代电力电子产品的希望,因为它比具有优越的性能. 本综述详细介绍了β-Ga2O3晶体管的进展,并讨论了商业化方面的挑战.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 电气工程 电气工程
背景情况:
- 动力电子对于能源效率至关重要,由于电动汽车和可再生能源的需求不断增加,电力电子对能源效率至关重要.
- (Si) 面临着高功率应用的局限性,需要先进的材料.
- 超宽带间隙 (UWBG) 半导体提供卓越的性能特性.
研究的目的:
- 提供关于β相氧化物 (β-Ga2O3) 场效应晶体管 (FET) 进展的全面审查.
- 总结材料,设备设计和制造过程中β-Ga2O3技术的进展.
- 讨论基于β-Ga2O3的功率电子产品商业化的挑战和未来战略.
主要方法:
- 关于β-Ga2O3表层生长和异构结构的现有文献的审查.
- 对各种晶体管设计,通道材料,欧姆接触和门介电物的分析.
- 讨论缺陷特征,热管理和兴奋剂挑战.
主要成果:
- β-Ga2O3具有4.9 eV的带隙和高分解电场 (8 MV cm-1),表现优于SiC和GaN.
- 融化生长能力使成本效益高,大型,高质量的基板成为可能.
- 在高性能β-Ga2O3和β-(AlxGa1-x) 2O3异构结构装置方面取得了显著进展.
结论:
- β-Ga2O3是下一代高功率和射频电子产品的领先候选者.
- 解决缺陷控制,热管理和p型兴奋剂方面的挑战对于商业可行性至关重要.
- 对新型结构和制造技术的进一步研究将加速采用.
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