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对点自动对焦显微镜的最大可接受倾斜角度

Huixu Song¹, Qingwei Li¹, Zhaoyao Shi¹

¹Beijing Engineering Research Center of Precision Measurement Technology and Instruments, Beijing University of Technology (BJUT), Beijing 100124, China.

Sensors (Basel, Switzerland)

|December 23, 2023

概括

本研究介绍了点自动对焦显微镜的射线追踪模型,以分析几何采集. 结果显示,最大可接受的倾斜角因测量方向和光束偏移距离而异,这对于精密制造至关重要.

科学领域:

光学计量学在光学计量学
精密工程精密工程是指精密的工程.

背景情况:

准确的几何信息对于高端仪器性能和制造中的产品质量至关重要.
工业显微镜提供高精度,但面临复杂形状和大倾斜角度的挑战.

研究的目的:

开发点自动对焦显微镜的光线追踪模型,以量化倾斜角度和光束偏移之间的关系.
分析工业测量的最大可接受的倾斜角度.

主要方法:

为点自动对焦显微镜开发了一种光线追踪模型.
使用高精度的参考球来模拟表面的倾斜和位移.
量化了最大可接受倾斜角度和光束偏移之间的关系.

主要成果:

在点自动对焦显微镜中,最大可接受的倾斜角因测量方向而异.
光束偏移距离对最大可接受倾斜角度的影响有所不同.
实验结果显示,与理论预测的偏差小于0.5°.

结论:

开发的模型准确地预测了几何测量点自动对焦显微镜的性能.
了解倾斜角限制对于优化制造业中的精度测量至关重要.
该研究为评估复杂表面的测量精度提供了定量基础.

关键词:

复杂的组件复杂的组件复杂的组件最大的可接受倾斜角度.点自动聚焦显微镜显微镜参考球体参考球体小组件是小组件的组成部分.

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