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高性能SAW共振器与虚假模式抑制使用六角加权电极结构
Yulong Liu1, Hongliang Wang1, Feng Zhang1
1National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.
Sensors (Basel, Switzerland)
|December 23, 2023
概括
这项研究引入了一个六角加权结构,以抑制表面声波 (SAW) 共振器中的虚假模式. 制造的共振器表现出卓越的性能,为增强的设备设计提供了可行的解决方案.
科学领域:
- 工程 工程师 工程师 工程师
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
背景情况:
- 表面声波 (SAW) 共振器是电子和通信系统中的关键组件.
- SAW共振器中的虚假模式降低了设备的性能,需要有效的抑制策略.
研究的目的:
- 提出和验证一种新的六角加权结构,用于抑制SAW共振器中的虚假模式.
- 为了提高SAW共振器设备的性能和可靠性.
主要方法:
- 开发一个有限元共振器模型来确定数字间传感器 (IDT) 和模拟指的权重参数.
- 使用微电子机械系统 (MEMS) 工艺制造具有传统和六角加权结构的SAW共振器.
- 通过制造的共振器的S参数测试进行实验验证.
主要成果:
- 六角形加权结构有效地限制了虚假波,同时对主模式的影响最小.
- 制造的六角加权SAW共振器表现出显著的虚假模式抑制.
- 与传统结构相比,表现出优越的性能,包括更高的Q值 (10,406),改善的回归损失 (-25.7 dB),以及降低峰值侧叶比率 (19%).
结论:
- 六角加重结构为SAW共振器中抑制虚假模式提供了可行和有效的解决方案.
- 这种设计方法可以提高设备的特性和整体性能.
- 这些发现有助于SAW共振器技术的进步,用于各种工程应用.
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