对宽带异声波层表面声波共振器横向模式抑制的实验研究
IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|December 26, 2023
概括
本研究涉及宽带表面声波 (SAW) 共振器中的横向模式抑制. 齐格扎格的apodization有效地抑制横向模式,同时保持质量因素,为高性能设备提供了一个有前途的解决方案.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 声学 声学 在声学方面
背景情况:
- 横向模式抑制对于高性能表面声波 (SAW) 共振器至关重要.
- 现有的方法对于窄带共振器是有效的,但对于宽带应用缺乏证明.
研究的目的:
- 研究宽带SAW共振器的横向模式抑制技术.
- 在LiNbO3 / 石英异声声层结构上评估新型设计.
主要方法:
- 使用了11°YX-LiNbO3 (LN) /70°Y90°X-石英 (Qz) 的异声层结构.
- 提出并测试了两个设计:模拟电极修改和齐克扎格形状的apodization.
- 测量了共振器性能,重点关注横向模式抑制和质量 (Q) 因素.
主要成果:
- 模拟电极的形状没有显著影响横向模式抑制.
- 齐格扎格形状的apodization有效地抑制了宽带共振器中的横向模式.
- 齐克扎克式的apodization保持了与传统设计相比的Q因子,只是为了增强压制而进行了轻微的权衡.
结论:
- 齐格扎格形状的apodization是一种可行且有效的方法,用于宽带SAW共振器的横向模式抑制.
- 这种技术可以提高性能,而不会显著降低共振器的Q因子.
- 这些发现为开发高性能宽带SAW设备提供了途径.
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