在MEMS陀螺仪和完全差异的料透过取消方法中,料透过效应.
Yuting Wu1,2, Chongyang Fan1,2, Liutao Gu1,2
1National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai 200240, China.
The Review of scientific instruments
|January 4, 2024
概括
本研究引入了一种用于微电机系统 (MEMS) 陀螺仪的新输入取消方法. 这项新技术通过减少不必要的输入信号,显著提高了信号质量,提高了陀螺仪的性能.
科学领域:
- 电气工程 电气工程
- 机械工程 机械工程
- 传感器技术 传感器技术
背景情况:
- 在MEMS陀螺仪中的输入信号,由输入电容引起,降低性能.
- 现有的取消方法通常依赖于制造工艺和结构对称性,限制了有效性.
研究的目的:
- 为MEMS陀螺仪提出和验证一种新的输入取消方法.
- 用同等电路和入口图来分析输入效应.
- 为了提高MEMS陀螺仪的信号噪声比和整体信号质量.
主要方法:
- 开发了一个完全差异化的配置,用于通过取消输入.
- 包含两个反向输入取消电路,以调整路径不对称.
- 使用同等电路模型和入口图分析了输入影响.
- 比较不同的驱动器和检测配置以解决路径不匹配.
主要成果:
- 实现了输入信号的显著抑制,将输入通道水平降低了50.53dB.
- 将有效信号的幅度从4.10增加到9.46dB.
- 与取消前的水平相比,信号噪声比提高了212.48%.
结论:
- 拟议的完全差异化的输入取消方法有效地减轻了干扰.
- 这种方法通过提高信号质量来提高MEMS陀螺仪的性能.
- 该方法提供了一个强大的解决方案,独立于微型制造过程的局限性.
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