用频域热反射度的热性质的反转
Benjamin Treweek1, Volkan Akcelik1, Wyatt Hodges1
1Sandia National Laboratories, Albuquerque, New Mexico 87123, United States.
ACS applied materials & interfaces
|January 9, 2024
概括
先进的模拟和分析技术评估微电子设备的键质量. 频域热反射 (FDTR) 和有限元法 (FEM) 模拟绘制了导热率图,以揭示3D集成系统中的潜在故障.
科学领域:
- 微电子工程 微电子工程
- 材料科学 材料科学 材料科学
- 热分析 热分析
背景情况:
- 3D集成增强了微电子设备,但由于热膨胀不匹配,引入了热力学应力.
- 在3D集成系统中,金属碰撞键容易发生热力学和电气故障.
- 先进的表征对于评估复杂的3D微电子组件中的键质量至关重要.
研究的目的:
- 开发和应用先进的表征技术来评估3D集成微电子设备中的键质量.
- 用有限元素方法 (FEM) 模拟来建模复杂的几何形状,并确定未知的热性质.
- 用实验数据绘制导热率的空间分布图,表示键质量,使用实验数据.
主要方法:
- 利用有限元法 (FEM) 模拟与高性能计算用于复杂的几何建模.
- 实施基于梯度的优化技术来确定未知的热特性.
- 应用频域热反射 (FDTR) 用于非破坏性地测量热性能.
- 从化 (GaN) -钻石样本分析了FDTR实验数据.
主要成果:
- 通过使用FEM模拟成功建模了复杂的样本几何结构.
- 通过优化开发了一种方法来确定离散领域的热性质.
- 在GaN-钻石样本的未知层中获得了导热率的空间地图.
- 证明了FDTR与FEM相结合的能力,以评估债券质量.
结论:
- 开发的基于FEM的FDTR方法可以在复杂的微电子结构中准确确定热性质.
- 该技术提供了粘合质量的空间地图,这对于识别3D集成设备中的潜在故障地点至关重要.
- 先进的模拟和非接触式热特性对于可靠的3D微电子集成至关重要.
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