透过玻璃 (TGV) 技术用于传感器制造和包装的应用
Chen Yu1, Shaocheng Wu1, Yi Zhong1
1School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China.
Sensors (Basel, Switzerland)
|January 11, 2024
概括
通过玻璃Via (TGV) 技术,通过在玻璃基板中创建电气互连,使传感器和微电机械系统 (MEMS) 的先进包装成为可能. 这次审查涵盖了TGV制造,可靠性和MEMS传感器中的应用.
科学领域:
- 材料科学与工程 材料科学与工程
- 电气工程 电气工程
- 微型制造技术 微型制造技术
背景情况:
- 玻璃是传感器和MEMS包装的多功能基板,因为其优良的热,化学和电性能.
- 通过玻璃通道 (TGV) 技术对于在玻璃基板内创建电气互连至关重要,用于先进的包装.
研究的目的:
- 为通过玻璃 (TGV) 制造和整合的研究进展提供全面的审查.
- 总结高铁技术的合格和可靠性成就.
- 讨论高铁技术的当前和未来应用,特别是MEMS传感器.
主要方法:
- 审查有关高铁制造技术的现有科学文献.
- 对高铁集成研究的分析,包括通过形成和金属化.
- 汇编高铁资格和可靠性测试数据.
主要成果:
- 在TGV制造方法和金属化工艺方面取得了重大进展.
- 证明高铁技术的高可靠性和合格性,适用于苛刻的应用.
- 成功地将TGV技术集成到各种传感器中,包括MEMS设备.
结论:
- 高铁技术是传感器和MEMS设备先进包装的成熟和可靠的解决方案.
- 预计持续的研发将扩大TGV在新兴技术中的应用.
- 高铁技术为电子系统的小型化和性能提升提供了一条途径.
相关概念视频
Total Internal Reflection Fluorescence Microscopy
Total internal reflection fluorescence microscopy or TIRF is an advanced microscopic technique used to visualize fluorophores in samples close to a solid surface with a higher refractive index, such as a glass coverslip. TIRF only allows fluorophores in proximity to the solid surface to be excited. When light from a medium with a lower refractive index (such as air) hits the glass coverslip at a critical angle, the light undergoes total internal reflection stead of passing through the glass.
Glassware Calibration
Accurate calibration of glassware, such as volumetric flasks, pipettes, and burettes, is essential to ensure accurate measurements in the analytical laboratory. Calibration helps maintain consistency across measurements and prevents errors arising from inaccurate volumes.
Volumetric flasks: Volumetric flasks are designed to prepare aqueous solutions of precise volumes accurately with a calibration line on the neck. To calibrate a volumetric flask, it is important to fill it with distilled...
Volumetric flasks: Volumetric flasks are designed to prepare aqueous solutions of precise volumes accurately with a calibration line on the neck. To calibrate a volumetric flask, it is important to fill it with distilled...
Gas Chromatography: Overview of Detectors
Detectors in gas chromatography (GC) help identify and quantify the components of a mixture by translating chemical properties into measurable signals, which are displayed on a chromatogram. Detectors can be categorized into two main types: destructive and non-destructive.
A non-destructive detector allows a sample to be analyzed without altering or consuming it, meaning the sample can be collected after detection for further analysis. Examples include thermal conductivity detectors and...
A non-destructive detector allows a sample to be analyzed without altering or consuming it, meaning the sample can be collected after detection for further analysis. Examples include thermal conductivity detectors and...
Gas Chromatography: Types of Detectors-I
There are different types of detectors used in gas chromatography, each with its own specific properties that make it suitable for detecting certain types of analytes. The most commonly used detectors in GC are thermal conductivity detector (TCD), flame ionization detector (FID), and electron capture detector (ECD).
TCD is the earliest and most widely used detector that operates by measuring the changes in the thermal conductivity of the carrier gas. When a sample compound enters the detector,...
TCD is the earliest and most widely used detector that operates by measuring the changes in the thermal conductivity of the carrier gas. When a sample compound enters the detector,...
Gas Chromatography: Types of Detectors-II
In gas chromatography, different detectors are employed to meet specific analytical needs. These detectors are often categorized based on their detection mechanisms and the types of compounds they are best suited to analyze. Thermal Conductivity Detectors (TCD), Flame Ionization Detectors (FID), and Electron Capture Detectors (ECD) represent common categories, each with unique operating principles and applications. However, beyond these, several other detectors are designed for more specialized...
High-Performance Liquid Chromatography: Types of Detectors
The role of the detectors in High-Performance Liquid Chromatography (HPLC) is to analyze the solutes as they exit from the chromatographic column. The detector recognizes the solute's property and generates corresponding electrical signals, which are converted into a readable graph of the detector's response versus elution time called a chromatogram at the computer. There are several types of HPLC detectors, each with its own advantages and limitations, depending on the analyte properties and...


