概括
本研究介绍了一种先进的源面罩优化 (SMO) 方法,用于对抗半导体光刻学中的线末缩短. 新技术通过适应性地专注于关键的线末区域,显著提高了特征保真度.
科学领域:
- 计算式 lithography 的使用方法.
- 半导体制造业 半导体制造业
- 光学物理学的光学物理.
背景情况:
- 源面膜优化 (SMO) 对于纠正光刻扭曲至关重要.
- 线末缩短仍然是一个重大挑战,影响先进半导体节点的图像保真度.
- 现有的SMO方法很难有效地解决线端缩短问题.
研究的目的:
- 提出一种新的源面罩优化方法来抑制线端缩短.
- 为了提高石版的真实性,特别是在关键的线末区域.
- 为了提高半导体制造中的模式传输的准确性.
主要方法:
- 开发了一种自适应式混合权重方法,在优化过程中优先考虑线末区域.
- 在每次代中,根据边缘放置错误 (EPE) 来动态更新权重.
- 设计了一个成本函数,该函数包含了一个正常化图像日志斜率 (NILS) 惩罚术语.
- 通过扩大和延长分割轮来控制罚款项的范围,以减轻线末缩短.
主要成果:
- 拟议的SMO方法有效地抑制了线末缩短.
- 与传统的SMO技术相比,石版精度得到了显著提高.
- 适应加权和基于NILS的处罚在关键领域表现出了卓越的表现.
- 模拟结果验证了该方法在先进节点光刻技术中的有效性.
结论:
- 开发的自适应SMO方法为线末缩短提供了强大的解决方案.
- 这种方法提高了整体的石版真实性和图案准确性.
- 它代表了半导体制造在先进节点的重大进步.
相关概念视频
01:22Upsampling
238
Managing signal sampling rates is essential in digital signal processing to maintain signal integrity. A decimated signal, characterized by a reduced frequency range due to its lower sampling rate, can be upsampled by inserting zeros between each sample. This upsampling process expands the original spectrum and introduces repeated spectral replicas at intervals dictated by the new Nyquist frequency. To refine this zero-inserted sequence, it is passed through a lowpass filter with a cutoff...
238
01:20Downsampling
158
When considering a sampled sequence with zero values between sampling instants, one can replace it by taking every N-th value of the sequence. At these integer multiples of N, the original and sampled sequences coincide. This process, known as decimation, involves extracting every N-th sample from a sequence, thereby creating a more efficient sequence.
The Fourier transform of the decimated sequence reveals a combination of scaled and shifted versions of the original spectrum. This...
The Fourier transform of the decimated sequence reveals a combination of scaled and shifted versions of the original spectrum. This...
158
01:18Aliasing
136
Accurate signal sampling and reconstruction are crucial in various signal-processing applications. A time-domain signal's spectrum can be revealed using its Fourier transform. When this signal is sampled at a specific frequency, it results in multiple scaled replicas of the original spectrum in the frequency domain. The spacing of these replicas is determined by the sampling frequency.
If the sampling frequency is below the Nyquist rate, these replicas overlap, preventing the original...
If the sampling frequency is below the Nyquist rate, these replicas overlap, preventing the original...
136
01:10Reconstruction of Signal using Interpolation
203
Signal processing techniques are essential for accurately converting continuous signals to digital formats and vice versa. When a continuous signal is sampled with a period T, the resulting sampled signal exhibits replicas of the original spectrum in the frequency domain, spaced at intervals equal to the sampling frequency. To handle this sampled signal, a zero-order hold method can be applied, which creates a piecewise constant signal by retaining each sample's value until the next...
203
01:23Lossless Lines
125
In electrical engineering, a lossless transmission line is characterized by a purely imaginary propagation constant and a resistive characteristic impedance. The ABCD parameters, which describe the relationship between the input and output voltages and currents, indicate an equivalent π circuit with an imaginary series impedance and a shunt admittance. This results in a transmission line that, when the product of the phase constant (beta) and the length of the line is less than pi,...
125
01:17Bandpass Sampling
183
In signal processing, bandpass sampling is an effective technique for sampling signals that have most of their energy concentrated within a narrow frequency band. This type of signal is known as a bandpass signal. The key principle of bandpass sampling involves sampling the signal at a rate that is greater than twice the signal's bandwidth to prevent aliasing.
A bandpass signal has a spectrum with a lower frequency limit, denoted as ω1, and an upper frequency limit, denoted as ω2....
A bandpass signal has a spectrum with a lower frequency limit, denoted as ω1, and an upper frequency limit, denoted as ω2....
183