通过载体提取结构在InGaAs/InP单光子雪崩二极管阵列中的高交叉抑制
Yongsheng Tang1,2, Rui Wang1, Xiaohong Yang3,4
1State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China.
Nature communications
|January 18, 2024
概括
一个新的载体提取结构有效地减少了InGaAs/InP单光子雪崩二极管阵列中的交叉声. 这种方法引导光生成的孔,显著提高了3D成像和量子技术的性能.
科学领域:
- 光子学和半导体设备 半导体设备
- 量子技术 量子技术 是一个量子技术.
背景情况:
- 交叉声是单光子雪崩二极管 (SPAD) 阵列中的一个关键挑战.
- 在InGaAs/InP SPAD中用于光学交叉声抑制的以前的基于沟的方法被证明是不够的.
研究的目的:
- 识别和解决InGaAs/InP SPAD阵列中占主导地位的交叉语音机制.
- 开发一种有效的方法来减少交叉通话,而不会损坏设备结构.
主要方法:
- 一个新的载体提取结构的演示.
- 在非像素区域的光生成交叉孔的电气引导.
- 实验测量了与不同像素距差的交叉声减少.
主要成果:
- 确定了光电交叉声作为主要机制.
- 在100 (50) μm像素距阵列中,在最近的邻居之间实现了91.52% (96.22%) 的交叉声减少.
- 载体提取结构没有造成蚀刻损伤.
结论:
- 载体提取结构有效地减轻了InGaAs/InP SPAD中的交叉声.
- 这种方法可以制造出高像素密度,低交叉的数组.
- 这些发现对于高分辨率3D成像和量子应用的进步至关重要.
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