半导体中的双材料接口的凝聚性特性:使用反向凝聚性接触方法进行实验研究和数值模拟
Caio Adler1, Pedro Morais1, Alireza Akhavan-Safar2
1Faculdade de Engenharia, Universidade do Porto, Rua Dr. Roberto Frias, 4200-465 Porto, Portugal.
Materials (Basel, Switzerland)
|January 23, 2024
概括
这项研究量化了半导体包装的界面断裂特性,揭示了环氧成型化合物和聚胺接口的关键数据,以提高设备可靠性和预测故障.
科学领域:
- 材料科学 材料科学 材料科学
- 机械工程 机械工程
- 半导体制造业 半导体制造业
背景情况:
- 半导体设计的可靠性取决于理解在双材料接口上的裂传播.
- 这些接口的断裂行为未被充分探索,阻碍了数值预测和产品开发.
- 由于缺乏特定的接口数据,需要积极补救半导体包装的进步.
研究的目的:
- 实验性地研究半导体中常见的双材料接口在准静态负荷下.
- 使用反向凝聚区建模方法来确定接口凝聚性特性.
- 为预测接口强度和减轻芯片包装中的故障模式提供关键数据.
主要方法:
- 制造的双悬臂梁样本用于模式I静态断裂分析.
- 采用基于合规的方法来测量裂大小和模式I能量释放率 (GIc).
- 使用Abaqus软件进行模拟,通过凝聚性区域建模 (CZM) 提取接口凝聚性接触特性.
主要成果:
- 环氧成型化合物 (EMC) 接口:最大强度为26 MPa,GIc为0.05 N/mm.
- 聚胺/氧化接口 (和EMC之间):最大拉伸强度为21.5 MPa,GIc为0.02 N/mm.
- 凝聚性区域建模成功定义了损害传播行为.
结论:
- 该研究提供了关于半导体包装双材料接口断裂特性的重要定量数据.
- 这些发现使设计人员能够在Mode I加载下预测接口强度和潜在故障模式.
- 结果指导未来对材料增强和制造/温度对分层的影响的研究.
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