通过阴极弧蒸发合成的V-O-N涂层的机械性能
Bogdan Warcholinski1, Adam Gilewicz1, Alexandr S Kuprin2
1Faculty of Mechanical Engineering, Koszalin University of Technology, 75-453 Koszalin, Poland.
Materials (Basel, Switzerland)
|January 23, 2024
概括
这项研究研究了-氧- (V-O-N) 涂层,发现增加的氧度大大改变了构成和结构性质. 较高的氧气水平会导致更多的缺陷和降低机械性能,包括硬度和耐磨性.
科学领域:
- 材料科学 材料科学 材料科学
- 表面工程是什么?表面工程是什么?
- 薄膜技术 薄膜技术
背景情况:
- -氧- (V-O-N) 涂层正在探索各种应用.
- 了解氧气对V-O-N涂层性能的影响对于优化其性能至关重要.
- 阴极弧蒸发是沉积这些涂料的常见技术.
研究的目的:
- 研究不同氧度对V-O-N涂层的组成,结构和机械性能的影响.
- 确定最佳的氧气水平,以实现所需的涂层特性.
- 分析涂层中的相位形成和缺陷演变.
主要方法:
- 涂料使用在受控氧气部分压力下使用阴极弧蒸发来制造.
- 使用能量分散式X射线光谱 (EDX) 和X射线衍射 (XRD) 分析了组成和结构.
- 机械性能,包括硬度,粘附性和耐磨性,使用纳米缩,痕测试和球对盘测试进行了评估.
主要成果:
- 观察到氧含量显著增加 (从约16%升至63%) 和含量减少 (从约34%降至3%),氧度增加 (20-30%).
- 确定了V5O9阶段,一个马格尼利阶段.
- 表面缺陷随着氧气度的增加而增加,而硬度,粘附性和耐磨性则下降.
结论:
- 氧在V-O-N涂层中与一起形成化合物时,表现出比更高的反应性.
- 增加的氧气度会对机械完整性产生负面影响,并增加V-O-N涂层的表面缺陷.
- 在沉积过程中仔细控制氧气水平对于量身定制V-O-N涂层特性至关重要.
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