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增强的数据处理算法用于分散干涉测量,使用五秒激光

Tao Liu¹, Hiraku Matsukuma¹, Amane Suzuki¹

¹Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan.

Sensors (Basel, Switzerland)

|January 23, 2024

概括

两个新的算法增强了分散干扰测量,用于准确的距离测量. 这些方法大大减少了测量误差,并消除了死区,提高了绝对距离测量能力.

科学领域:

光学和光子学在光学和光子学.
计量学计量学计量学
激光技术激光技术激光技术

背景情况:

使用 Femtosecond 激光器进行分散干扰测量,可提供高精度绝对距离测量.
传统方法面临着诸如死区和固有的理论偏差等局限性,限制了测量范围和精度.

研究的目的:

提出和验证两种用于分散干扰测量的新型数据处理算法.
为了提高测量准确度,减少或消除绝对距离测量的死亡区域.

主要方法:

开发一个截断频谱算法,以减轻直接逆里埃转换的偏差.
引入一个高阶角度算法来解决接近零位置的不可测量死区.
使用分散式干扰仪与干扰光谱信号的设置进行实验验证.

主要成果:

截断频谱算法将输出距离偏差减少了八倍,达到低至1.3微米的精度.
高阶角度算法成功缩短了死区到22微米,扩大了可测量的距离范围.
模拟和实验证实了两种拟议的算法比传统方法的性能提高.

结论:

拟议的截断频谱和高阶角度算法显著提高了分散干涉测量的精度和范围.
这些算法有效地解决了死区限制,减少了测量偏差,推进了绝对距离测量技术.

关键词:

绝对距离测量绝对距离测量分散式干扰测量是一种分散式干扰测量.相反的里叶变换.

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