基于面积变化的电容型MEMS加速器中依赖频率的振动校正错误的分析
Shaolin Zhang1, Zhi Li1, Qiu Wang1
1MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.
Micromachines
|January 23, 2024
概括
强烈的环境振动会影响高精度应用. 这项研究揭示了加速度计中的振动纠正误差 (VRE) 源于频率依赖的非线性,但VRE在固定的振幅上是恒定的.
科学领域:
- 微电子机械系统 (MEMS) 技术
- 惯性传感和导航系统
背景情况:
- 环境振动可以降低加速度计的性能,导致振动纠正错误 (VRE).
- 对于诸如惯性导航和倾斜测量等高精度应用,VRE是一个关键问题.
研究的目的:
- 研究VRE在加速度计中的起源.
- 分析导致MEMS加速度计频率依赖非线性因素的因素.
主要方法:
- 使用自主开发的MEMS加速度计与面积变量的电容位移传感器.
- 研究了激发频率,位移幅度和非线性系数之间的关系.
主要成果:
- 第二阶非线性系数显示频率依赖.
- 振动纠正误差 (VRE) 在位移振幅恒定时保持不变.
- 确定了关键的贡献因素:共振放大,电容非线性 (边缘效应) 和悬浮偏移.
结论:
- 优化了位移传感器和缓冲,大大降低了二次非线性系数.
- 实现了非线性系数从mg/g2大幅降低到μg/g2,改善了加速度计的性能.
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