设计一个微电机械系统四重质量陀螺仪,符合机械放大功率的设计
Jingchuan Zhou1,2, Dacheng Xu3, Xinxin Li1,2
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Micromachines
|January 23, 2024
概括
一个新的机械放大结构提高了MEMS振动陀螺仪的灵敏度. 这种V形弹机制实现了365%的放大系数,显示了导航级性能的潜力.
科学领域:
- 机械工程 机械工程
- 微电机系统 (MEMS) 是指微电机系统.
背景情况:
- MEMS振动陀螺仪对于惯性导航至关重要.
- 提高陀螺仪的灵敏度对于提高性能至关重要.
研究的目的:
- 为MEMS振动陀螺仪提出并验证一种新的机械放大结构.
- 通过V形弹偏向机制来增强陀螺仪的灵敏度.
主要方法:
- 机械放大陀螺仪的设计和模拟.
- 一个概念验证的垂直轴陀螺仪的制造.
- 对陀螺仪的性能特征进行实验性评估.
主要成果:
- 实现了365%的机械放大系数.
- 自然频率为11.67KHz,测量范围高达±400°/s.
- 偏差稳定性为44.53°/h,最大非线性为54.69 ppm.
结论:
- 拟议的V形弹放大结构显著提高了陀螺仪的灵敏度.
- 演示的性能表明了通往导航级MEMS陀螺仪的有希望的途径.
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