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开发一个具有大加热面积和加热面积中低热应力的微热器

Tao Zhang¹, Zequan Pan¹, Chunhua Zhang¹

¹College of Electromechanical Engineering, Northeast Forestry University, Harbin 150040, China.

|January 23, 2024

概括

本研究提出了一种具有增强结构稳定性和大,均的加热面积的新型微型加热器设计. 优化的支梁减轻了热膨胀,确保了一个平坦的,没有扭曲的平台,用于精确的温度控制.

科学领域:

材料科学材料科学材料科学
机械工程机械工程
热力工程是热力工程中的一个.

背景情况:

微型加热器对于各种应用至关重要,但经常遭受热应力和变形.
由于材料限制和结构不稳定性,现有的设计可以限制加热面积和均性.

研究的目的:

开发一个优化的微型加热器设计,可以吸收热应力,并提供一个大,均的加热区域.
通过创新的结构修改,提高微热器的结构稳定性和性能.

主要方法:

利用深度蚀刻,在微热器周围加工四个对称分布的延长型支梁.
优化了微型加热器结构和制造过程,以创建一个稳定的加热平台.
进行了有限元模拟,以验证温度均性和结构稳定性.

主要成果:

实现了一个稳定的加热平台,具有10 × 10 mm2的统一工作面积.
通过模拟证明了高温均性和结构稳定性.
实验结果显示,最高温度为350°C,功耗为6W,热响应时间为22秒.

结论:

新型微热器设计有效地减轻了热膨胀引起的变形.
优化的结构确保了平坦的,没有扭曲的工作表面,提供了出色的结构稳定性.
这种微型加热器为苛刻的应用提供了可靠和均的加热解决方案.

关键词:

在MEMS MEMS中使用.大面积加热大面积加热微型加热器微型加热器温度的温度的温度的温度的温度

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