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超高频表面声波传感器用于温度检测

Qi Dong¹, Qutong Yang¹, Xiaoyang Liu¹

¹Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.

|January 23, 2024

概括

这项研究引入了一种新的超高频 (UHF) 表面声波 (SAW) 传感器,用于精确的温度检测. Z形SAW传感器设计为工业和医疗用途提供了增强的灵敏度和稳定性.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
传感器技术传感器技术

背景情况:

表面声波 (SAW) 传感器由于其高灵敏度,对工业和医疗应用非常有价值.
目前的SAW传感器通常具有复杂的设计,大尺寸和有限的稳固性,阻碍了广泛采用.
需要简化,稳定和高度敏感的SAW传感器平台.

研究的目的:

开发一种简单,稳定,高灵敏的超高频 (UHF) 延迟线SAW传感器用于温度检测.
优化Z形延迟线和数字间传感器 (IDT) 的设计,以提高性能.
在实验验证中证明传感器的有效性和灵敏度.

主要方法:

在压电基板上设计Z形延迟线,以提高灵敏度和减少尺寸.
数字模拟以确定极短距离数字间传感器 (IDT) 的最佳设计参数.
实验验证Z形SAW延迟线传感器的温度传感性能.

主要成果:

Z形延迟线设计成功提高了传感器的灵敏度,并减少了基板尺寸.
数字模拟确定了超高频操作和灵敏度的最佳参数.
实验结果显示,温度检测的高灵敏度为116.685°/°C.

结论:

开发的Z形UHF SAW传感器为温度检测提供了一个简单,稳定和高度灵敏的解决方案.
这种新型传感器设计为现有的SAW传感平台提供了一个有前途的替代方案.
传感器的性能表明,在需要精确温度监测的各种工业和医疗应用中,其潜力很大.

关键词:

高频频的高频频率是什么表面声波是一种表面声波.温度的温度的温度的温度的温度无线无线无线无线无线.

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