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无镜MEMS成像:一种非线性振动方法,利用喷雾喷射PZT触动纤维MEMS扫描仪进行微观照明

Wei-Chih Wang^1,2,3,4, Ming-Yao Li¹, Kuan-Chang Peng¹

¹Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan 30013 China.

Microsystems & nanoengineering

|January 23, 2024

概括

研究人员开发了一种新的混合MEMS扫描仪,用于小型显微镜成像. 该系统使用独特的光纤渐变和PZT执行器来实现先进的2D和螺旋扫描模式,以获取详细的图像.

科学领域:

显微镜成像显微镜成像
在 MEMS 技术方面,MEMS 技术
光学工程是指光学工程.

背景情况:

传统的MEMS扫描仪在基板上的PZT执行器耐用性方面面临着挑战.
紧型显微镜成像需要先进的扫描和照明技术.

研究的目的:

引入一种新的混合MEMS扫描系统,用于小型显微镜成像.
开发创新的图像捕捉和照明技术.
为了克服现有的 PZT-on-silicon MEMS 扫描仪的局限性.

主要方法:

使用了混合MEMS扫描仪,并配备了光纤波导.
在不钢基板上使用喷气喷雾打印的PZT双形推拉执行器.
杆非线性振动用于螺旋扫描模式生成和光纤渐变,以减少散射和共振频率调整.

主要成果:

成功生成了一个螺旋扫描图案,直径为60μm,率为10Hz.
证明了独立的2轴扫描与一个自由度的执行.
重建了微观结构的高分辨率图像,包括5微米线和Psychodidae翅膀.

结论:

新型混合MEMS扫描系统为紧的显微镜成像提供了强大的解决方案.
开发的技术可以实现先进的扫描模式和改进的照明控制.
这项技术解决了MEMS扫描仪设计和性能方面的关键挑战.

关键词:

电气和电子工程电气和电子工程微光学是一种微光学.

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