一个自我定位和度控制的MEMS加速度计
Yiming Jin1,2, Zhipeng Ma1,2, Ziyi Ye1,2
1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou, 310013 China.
Microsystems & nanoengineering
|January 23, 2024
概括
这项研究引入了一种具有静电刚度调节的新型MEMS加速度计. 它通过积极控制其参考位置和刚度来实现精确的测量,在高性能应用中显著减少温度引起的误差.
科学领域:
- 微电机系统 (MEMS) 是指微电机系统.
- 惯性传感器 惯性传感器
- 先进的控制系统先进的控制系统
背景情况:
- 在各种应用中,MEMS加速度计至关重要,但会受到温度偏移和不稳定的影响.
- 现有的调方法往往缺乏对关键参数 (如刚度和参考位置) 的全面控制.
- 对环境因素的有效补偿对于高性能惯性传感至关重要.
研究的目的:
- 介绍一款具有DC/AC静电刚度调节的高性能MEMS加速度计.
- 开发一个集静电调和温度效应的动态模型.
- 实施一种新的控制策略,以提高稳定性和准确性.
主要方法:
- 为双面平行板 (DSPP) MEMS加速度计开发动态模型.
- 实现DC/AC静电刚度调整以有效调整刚度和几何偏移校准.
- 自中心闭环的设计,以实现最佳的力-再平衡 (FTR) 定位.
- 整合一个封闭循环的刚性,以防止拉入不稳定.
- 实时温度偏移补偿使用参考位置和直流调节电压调整.
主要成果:
- 达到大约7μg/°C的温度漂移系数 (TDC).
- 显示的艾伦偏差不稳定性低于1μg.
- 成功实施了一种新的控制方法,结合了自我中心,刚度控制和温度补偿.
- 验证了静电调节对加速计性能增强的有效性.
结论:
- 拟议的MEMS加速度计与集成的控制策略提供了卓越的性能和稳定性.
- 新的控制方法有效地减轻了温度偏移,并确保了可靠的操作.
- 这种设计代表了高性能惯性传感技术的重大进步.
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