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相关概念视频

Gyroscope01:02

Gyroscope

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A gyroscope is defined as a spinning disk in which the axis of rotation is free to assume any orientation. When spinning, the orientation of the spin axis is unaffected by the orientation of the body that encloses it. The body or vehicle enclosing the gyroscope can be moved from place to place, while the orientation of the spin axis remains the same. This makes gyroscopes very useful in navigation, especially where magnetic compasses cannot be used, such as in crewed and crewless spacecraft,...
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Gyroscope: Precession01:24

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Precession can be demonstrated effectively through a spinning top. If a spinning top is placed on a flat surface near the surface of the Earth at a vertical angle and is not spinning, it will fall over due to the force of gravity producing a torque acting on its center of mass. However, if the top is spinning on its axis, it precesses about the vertical direction, rather than topple over due to this torque. Precessional motion is a combination of a steady circular motion of the axis and the...
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相关实验视频

Updated: Jul 5, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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一个自我定位和度控制的MEMS加速度计.

Yiming Jin1,2, Zhipeng Ma1,2, Ziyi Ye1,2

  • 1School of Aeronautics and Astronautics, Zhejiang University, Hangzhou, 310013 China.

Microsystems & nanoengineering
|January 23, 2024
PubMed
概括
此摘要是机器生成的。

这项研究引入了一种具有静电刚度调节的新型MEMS加速度计. 它通过积极控制其参考位置和刚度来实现精确的测量,在高性能应用中显著减少温度引起的误差.

关键词:
电气和电子工程 电气和电子工程传感器 传感器 传感器

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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科学领域:

  • 微电机系统 (MEMS) 是指微电机系统.
  • 惯性传感器 惯性传感器
  • 先进的控制系统先进的控制系统

背景情况:

  • 在各种应用中,MEMS加速度计至关重要,但会受到温度偏移和不稳定的影响.
  • 现有的调方法往往缺乏对关键参数 (如刚度和参考位置) 的全面控制.
  • 对环境因素的有效补偿对于高性能惯性传感至关重要.

研究的目的:

  • 介绍一款具有DC/AC静电刚度调节的高性能MEMS加速度计.
  • 开发一个集静电调和温度效应的动态模型.
  • 实施一种新的控制策略,以提高稳定性和准确性.

主要方法:

  • 为双面平行板 (DSPP) MEMS加速度计开发动态模型.
  • 实现DC/AC静电刚度调整以有效调整刚度和几何偏移校准.
  • 自中心闭环的设计,以实现最佳的力-再平衡 (FTR) 定位.
  • 整合一个封闭循环的刚性,以防止拉入不稳定.
  • 实时温度偏移补偿使用参考位置和直流调节电压调整.

主要成果:

  • 达到大约7μg/°C的温度漂移系数 (TDC).
  • 显示的艾伦偏差不稳定性低于1μg.
  • 成功实施了一种新的控制方法,结合了自我中心,刚度控制和温度补偿.
  • 验证了静电调节对加速计性能增强的有效性.

结论:

  • 拟议的MEMS加速度计与集成的控制策略提供了卓越的性能和稳定性.
  • 新的控制方法有效地减轻了温度偏移,并确保了可靠的操作.
  • 这种设计代表了高性能惯性传感技术的重大进步.