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在芯片上通过焦尔加热对的电热特性进行修改:应用于特拉赫兹微波计

Durgadevi Elamaran¹, Ko Akiba², Hiroaki Satoh^2,3

¹Graduate School of Science and Technology, Shizuoka University, Hamamatsu 432-8011, Japan.

Nanomaterials (Basel, Switzerland)

|January 26, 2024

概括

电流通过朱尔加热将 (Ti) 薄膜转化为氧化 (TiO_x). 这一过程提高了微波仪的性能,由于电热性能优化,显著提高了4.5倍的响应能力.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
纳米技术纳米技术

背景情况:

微波仪需要精确的热和电性能才能达到最佳性能.
(Ti) 薄膜用于微波仪的制造.
了解在电应力下材料相位过渡对于设备优化至关重要.

研究的目的:

用焦尔加热研究金属Ti转化为氧化 (TiO_x) 的过程.
为了评估这种转换对微气体计的电和热性能的影响.
为了确定对微波力表响应率和噪声等效功率 (NEP) 的影响.

主要方法:

使用集成的Ti热敏电阻 (2.7微米宽,50微米长) 制造微波计.
应用恒压应力来诱导Ti热电阻中的焦尔加热.
使用传输电子显微镜 (TEM),传输电子衍射 (TED) 和能量散射X射线 (EDX) 进行材料性质的表征.

主要成果:

焦耳加热诱导金属Ti膜上形成半导体TiO_x相.
热敏电阻增加了大约14倍.
观察到一个显著的负温度电阻系数 (TCR) -0.32%/K.
与未经处理的设备相比,设备的响应能力提高了4.5倍.
噪声等效功率 (NEP) 由于闪噪声增加而没有改善.

结论:

焦耳加热有效地将Ti转化为TiO_x,提高了微波力表的响应能力.
TiO_x的形成减轻了薄膜中狭窄宽度的影响.
虽然响应性得到了改善,但闪噪声仍然是NEP增强的限制因素.

关键词:

焦力加热焦力加热能量分散式X射线分析 (EDX)微波量计微波量计微波量计噪声等效功率 (NEP) 是指相当于噪声的功率.响应性的响应性电阻的温度系数 (TCR)的是什么的是什么氧化是一种氧化.传输电子显微镜 (TEM) 的使用

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