Jove
Visualize
联系我们
JoVE
x logofacebook logolinkedin logoyoutube logo
关于 JoVE
概览领导团队博客JoVE 帮助中心
作者
出版流程编辑委员会范围与政策同行评审常见问题投稿
图书馆员
用户评价订阅访问资源图书馆顾问委员会常见问题
研究
JoVE JournalMethods CollectionsJoVE Encyclopedia of Experiments存档
教育
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab Manual教师资源中心教师网站
使用条款与条件
隐私政策
政策

相关概念视频

您也可能阅读

相关文章

通过共同作者、期刊和引用图与本文相关的文章。

排序
Same author

Berberine hydrochloride induces apoptosis in triple-negative breast cancer cells through modulation of the sirtuin/p65 signalling axis.

Xenobiotica; the fate of foreign compounds in biological systems·2026
Same author

A stepwise decannulation pathway for patients with prolonged disorders of consciousness after brain injury: a retrospective feasibility study.

Frontiers in neurology·2026
Same author

Risk factors associated with fever after modified electroconvulsive therapy: A session-level study.

Psychiatry research·2026
Same author

Dietary Index for Gut Microbiota and All-Cause Mortality in CKM Syndrome: Evidence of a J-Shaped Association and Partial Mediation by DII and CDAI.

Endocrine, metabolic & immune disorders drug targets·2026
Same author

The Moderation Effect of Basic Need Satisfaction in the Relationship Between Drinking Motives and Drinking Outcomes.

Substance use & misuse·2026
Same author

High-Level Production of a <i>Rhizomucor miehei</i> Lipase Variant in <i>Komagataella phaffii</i> via Gene Dosage Optimization and Ribosomal Engineering for Biodiesel Synthesis.

Journal of agricultural and food chemistry·2026

相关实验视频

Updated: Jul 4, 2025

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
07:47

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Published on: February 12, 2017

7.2K

在DMD数字光刻系统中的边缘光滑优化方法基于动态模糊匹配像素重叠技术.

Shengzhou Huang, Bowen Ren, Yuanzhuo Tang

    Optics express
    |February 1, 2024
    PubMed
    概括

    数字微镜装置 (DMD) 石版边缘的光滑度通过使用一种新的动态模糊效应匹配像素叠加技术来提高. 这种方法显著减少了牙缺陷,提高了微型制造的保真度.

    科学领域:

    • 光学工程是指光学工程.
    • 微型制造技术 微型制造技术
    • 数字版画的数字版画.

    背景情况:

    • 基于数字微镜装置 (DMD) 的光刻技术因非整数像素错误而存在低边平滑性和牙缺陷.
    • 这些局限性阻碍了需要精确模式定义的高保真微型制造工艺.

    研究的目的:

    • 为了增强DMD数字光刻法产生的图像的边缘光滑度.
    • 为了解决当前DMD光刻技术中固有的牙缺陷.

    主要方法:

    • 开发了一种新的像素覆盖方法,称为基于动态模糊效果匹配像素覆盖技术的DMD数字光刻.
    • 核心创新包括在像素重叠期间引入受控运动模糊效应,以优化 lithography.

    主要成果:

    • 模拟和实验结果显示,牙边缘缺陷显著减少,从1.666微米降至0.27微米.
    • 使用 1/2 动态模糊效果与像素位移叠加的优化方法实现了边缘光滑度的大幅提高.

    结论:

    • 拟议的动态模糊效应匹配像素叠加技术有效地提高了 lithographic 图案的边缘光滑.
    • 这种优化方法为高保真性和高效的DMD数字光刻微型制造提供了有前途的解决方案.

    更多相关视频

    Patterning via Optical Saturable Transitions - Fabrication and Characterization
    08:19

    Patterning via Optical Saturable Transitions - Fabrication and Characterization

    Published on: December 11, 2014

    6.8K
    Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
    10:25

    Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

    Published on: September 14, 2018

    10.2K

    相关实验视频

    Last Updated: Jul 4, 2025

    Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
    07:47

    Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

    Published on: February 12, 2017

    7.2K
    Patterning via Optical Saturable Transitions - Fabrication and Characterization
    08:19

    Patterning via Optical Saturable Transitions - Fabrication and Characterization

    Published on: December 11, 2014

    6.8K
    Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
    10:25

    Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

    Published on: September 14, 2018

    10.2K