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Fabrication of Silica Ultra High Quality Factor Microresonators
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在微电子制造业的光学特性.

S Perkowitz1, D G Seiler1, W M Duncan2

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

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|February 8, 2024
PubMed
概括
此摘要是机器生成的。

光学表征技术对于半导体制造至关重要,为材料性能和设备性能提供非破坏性分析. 这些方法为开发先进的半导体材料和设备提供了至关重要的详细见解.

关键词:
拉曼散射是什么意思拉曼散射是什么意思圆测量 圆测量 圆测量红外光谱学 红外光谱学调制光谱学 调制光谱学光学显微镜的光学显微镜.摄影光的发光效应

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科学领域:

  • 材料科学 材料科学 材料科学
  • 固态物理 固态物理
  • 光电学是指光电子产品.

背景情况:

  • 半导体设备制造需要精确测量材料和设备参数.
  • 描述对于质量控制,新材料开发和理解微观结构至关重要.
  • 光学表征提供了非破坏性的,最小的样本准备和晶圆尺度映射功能.

研究的目的:

  • 审查半导体行业中使用的关键光学表征技术.
  • 突出光学方法相对于电气和化学方法的优势.
  • 展示这些技术用于测量各种半导体性能的应用.

主要方法:

  • 圆测量 圆测量 圆测量
  • 红外光谱学 红外光谱学
  • 显微镜的使用方法
  • 调制光谱学 调制光谱学
  • 摄影发光效应是一种光照效应.
  • 拉曼散射是什么意思?拉曼散射是什么意思

主要成果:

  • 光学技术测量基本参数,如带结构,载体散射,杂质,缺陷和层厚度等.
  • 这些方法是非破坏性的,需要最小的样本准备,并允许2D/3D属性映射.
  • 选择的技术涵盖了广泛的电磁辐射频谱,并测量各种半导体特性.

结论:

  • 光学表征对于半导体行业来说是不可或缺的,它支持研究和生产.
  • 讨论的技术为半导体材料和设备性能提供了全面的见解.
  • 这些非破坏性光学方法对于推进半导体技术至关重要.