结合移位和角度传感器,具有基于光学微分级的自成像效应的超高紧性
Mengdi Zhang1, Hao Yang1, Qianqi Niu1
1School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Sensors (Basel, Switzerland)
|February 10, 2024
概括
这项研究引入了一种紧的光学微分层传感器,用于同时测量线性和角位移. 新型传感器实现了高分辨率的位移和敏感的角度检测,为先进的定位系统铺平了道路.
科学领域:
- 光电学是指光电子产品.
- 纳米技术 纳米技术
- 计量学 计量学是一门学科.
背景情况:
- 精确测量线性和角位移对于精密工程和制造至关重要.
- 现有的传感器往往缺乏紧性或同时进行多维测量的能力.
- 光学微光为微型传感解决方案提供了潜力.
研究的目的:
- 提出和演示一个超紧的,用于同时测量线性和角位移的组合传感器.
- 为了利用光学微光的自成像效果进行同步传感.
- 在分辨率和灵敏度方面评估传感器的性能.
主要方法:
- 利用基于光学微光网的自成像效应的双网格结构.
- 通过理论分析和模拟研究光学传输特性.
- 实验验证了对线性位移 (相变) 和角位移 (振幅变) 的同步测量.
主要成果:
- 证明了光学传输和线性位移之间的正弦关系.
- 观察到传输幅度随着角的增加而下降,从而使角度测量成为可能.
- 实现了直线位移分辨率为4nm和角感度为0.26mV/arcsec在±1°.内.
结论:
- 拟议的传感器允许超紧,同步测量线性和角度移位,使用单个微网格结构.
- 没有额外的光学元件的通用路径设计增强了紧性和稳固性.
- 该传感器显示出在集成机械定位和半导体制造领域的应用潜力很大.
相关概念视频
Confocal Fluorescence Microscopy
Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...
Super-resolution Fluorescence Microscopy
Super-resolution fluorescence microscopy (SRFM) provides a better resolution than conventional fluorescence microscopy by reducing the point spread function (PSF). PSF is the light intensity distribution from a point that causes it to appear blurred. Due to PSF, each fluorescing point appears bigger than its actual size, and it is the PSF interference of nearby fluorophores that causes the blurred image. Various approaches to achieving higher resolution through SRFM have recently been developed.


