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为软X射线检测优化传感器的量子效率测量和建模

Maria Carulla¹, Rebecca Barten¹, Filippo Baruffaldi¹

¹Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland.

Sensors (Basel, Switzerland)

|February 10, 2024

概括

研究人员通过提高传感器量子效率来改进软X射线检测. 这一突破提升了同步子和X射线自由电子激光器中的混合像素探测器的性能.

科学领域:

在X射线探测器技术技术上,
材料科学用于辐射检测和检测.

背景情况:

混合像素探测器对于同步子和X射线自由电子激光设备至关重要.
探测器性能低于3keV,受到低量子效率和信号噪声比的限制.

研究的目的:

为了提高传感器的量子效率,用于软X射线检测.
为了提高混合像素探测器在低能量的性能.

主要方法:

通过表面被动化精制的传感器入口窗户设计.
优化了n+区域的兴奋剂概况.
制造的平面传感器具有薄的入口窗户和经过测试的工艺变化.

主要成果:

对250 eV光子实现了量子效率的显著提高,从0.5%提高到62%.
增强的量子效率与背面照明的科学CMOS传感器相提并论.
确定了各种过程参数对量子效率的影响.

结论:

表面被动化和优化的兴奋剂配置文件大大提高了软X射线检测.
开发的传感器为低能量的X射线应用提供了可行的替代方案.
已经概述了进一步提高量子效率的战略.

关键词:

在入口窗口的窗户.量子效率是指量子效率是指量子效率.软X射线传感器软X射线传感器

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